Semi-Automatic Resist Coating Device (Semi-Auto Spin Coater) Coater
Supports low to high viscosity resist! Can produce semi-automatic machines for any wafer size!
This product is equipped with spin coating, HMDS treatment, baking, and cooling functions. Since we handle everything from design to manufacturing and sales in-house, we have realized the production of semi-automatic machines at low prices for customers who cannot afford to buy fully automatic machines or for those who do not need a fully automatic machine for small lots! We have a proven track record with a variety of chemicals including positive-negative resists, polyimides, SOG, wax, and silicones. We also have extensive experience in substrate transport for various materials such as Si (silicon), GaAs, InP, GaN, SiC, sapphire, and ceramics, as well as SiO2 (glass). 【Features】 ■ Achieves low cost with semi-automatic resist coating machines ■ Compatible with substrates from 2 to 12 inches ■ Supports low to high viscosity (1.7cP to 10000cP) ■ Proven track record with a variety of chemicals ■ Reduced footprint (space-saving) ■ Numerous options for resist reduction *For more details, please refer to the PDF document or feel free to contact us.
- Company：エイ・エス・エイ・ピイ
- Price：Other
